Nano Scientific Inc

Engineering Solutions
Home     AFM/SPM     SEM     TEM     XRD     Hydrogen Generators     Hydrogen Plants     Nitrogen     Reliability     Contact Us      

Scanning Electron Microscope

World’s most widely-used family of SEMs!

The NANO Scientific SEM is a high-performance scanning electron microscope for fast characterization and imaging of fine structures on both small and large samples. One of a family of four SEM models that are widely-used in all research fields and industrial applications, the NANO SEM enables observation of specimens up to 200mm in diameter.

Throughout the evolution of this popular SEM family, NANO SCIENTIFIC has continued to enhance features and capabilities to offer the best possible imaging resolution, versatility, and operator interface.

 

With a high resolution of 3.0nm at 30kV, the NANO SEM delivers amazing clarity of the finest structures. In addition to routine imaging at several hundreds of times greater resolution than the optical microscope, and with a focal depth several tens of times greater than the optical microscope, the SEM allows for detailed measurements, including 3D measurement from stereo images. Dual live image display of the secondary electron image and a backscattered composition image allow the user to contrast and compare specific details. An optional energy dispersive X-ray spectrometer (EDS) provides elemental analysis.

 

 

Specifications

Resolution SE

3.0nm GUARANTEED at 30kV (High Vacuum Mode)
10nm  GUARANTEED at 3kV (High Vacuum Mode)

Resolution BSE

4.0nm GUARANTEED at 30kV (Low Vacuum Mode)

Magnification

5X - 300.000X

Accelerating Voltage

0.3 - 30kV

Electron Optics

Hitachi patented Quad Bias-function instead of expensive LaB6-tips

Electron gun

Tungsten Emitter (Filament-change within 20 minutes)

 

RELATED to POLAROID (4" X 5")

Low Vacuum Range

6 - 270Pa through quick menu

Image Shift

± 50µm at WD = 10mm

Objective aperture

5-Positions, ClickStop Objective Aperture

 

 

Image Shift

± 50µm at WD = 10mm

Maximum Specimen Size

200mm in diameter

Specimen Stage

 

Type II

X: 0 - 100mm
Y: 0 - 50mm
Z: 5 - 65mm
R: 360°
T: -20° - +90°
Specimen diameter = 200mm
Maximum Specimen Height: 80mm at WD = 10mm
Motorized: 5 axes in standard

 

 

Detector system

Everhardt Thornley Secondary Electrons (SE) Detector

 

High Sensitivity Semiconductor BSE Detector - 4+1-Segment

 

EnergyDispersiveX-ray Spectrometry (EDS/EDX)

 

FF WavelengthDispersiveX-ray Spectrometer (WDX)

 

ElectronBackScatteredDiffraction-Analyzer (EBSD)

 

Cathode Luminescence Spectrometer (CL)

 

Hitachi Environmental SE Detector ESED II (2.GENERATION!!!)

 

X-ray source

 

 

Image Display

PC with Windows XP*

 

One or Two Flat Panel 19"

 

640 x 480 up to 5.120 x 3.840 pixel

 

Multiple Image formats (JPG/TIFF/BMP)

 

Signal Mixing - Fully selectable Detector signals

 

Dual Image Display

 

 

Automatic Alignment

Auto Beam Setting - Auto Axial Alignment

Auto Image Adjustments

Auto Focus - Auto Stigmator/Focus

 

Auto Brightness & Contrast

 

 

Additionals

Oil-free evacuation system

 

Specimen exchange with 30 SECONDS

 

Easy-to-use software

 

Hitachi SEM Security System

 

Hitachi Control panel with proven Rotary Knob Set

 

Dynamic Focus & Tilt compensation

 

Hi Mouse - One Keyboard & One Mouse for two PC´s

 

Several Wafer/Specimen holders are included